JPH0257955U - - Google Patents
Info
- Publication number
- JPH0257955U JPH0257955U JP13623388U JP13623388U JPH0257955U JP H0257955 U JPH0257955 U JP H0257955U JP 13623388 U JP13623388 U JP 13623388U JP 13623388 U JP13623388 U JP 13623388U JP H0257955 U JPH0257955 U JP H0257955U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- drive shaft
- workpiece
- crucible
- ion plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001704 evaporation Methods 0.000 claims description 4
- 238000007733 ion plating Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 230000007246 mechanism Effects 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13623388U JPH0257955U (en]) | 1988-10-19 | 1988-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13623388U JPH0257955U (en]) | 1988-10-19 | 1988-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0257955U true JPH0257955U (en]) | 1990-04-26 |
Family
ID=31396550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13623388U Pending JPH0257955U (en]) | 1988-10-19 | 1988-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0257955U (en]) |
-
1988
- 1988-10-19 JP JP13623388U patent/JPH0257955U/ja active Pending
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